Micro Heating Stage MHS
A miniaturized heating stage with closed-loop control — up to 200 °C, or 450 °C with the MHS450 variant.
Built into the stub#
The MHS takes the exact form factor of a standard microscopy stub, so it mounts to the microscope stage the same way a stub does and drops straight into the existing feedthrough system shared with Kleindiek’s micromanipulators. A sliding sample plate inserts into the stage’s receptacle for quick sample changes. The bundled Temperature Control System heats from room temperature to 200 °C in vacuum, at a resolution of 1 °C, and reaches 100 °C in around 100 s. Long-term sensor stability holds better than 0.05 % at 200 °C after 1000 hours, which matters for extended IC stress testing, ageing tests and bond-pad re-soldering runs where the set point has to hold steady for days.
The MHS450 variant#
Where 200 °C is not enough, the MHS450 keeps the same stub-mounted form factor — 15 mm diameter, 14 mm tall — but drives the sample from room temperature to 450 °C in vacuum, at 0.1 °C resolution, ten times finer than the standard stage. Samples mount to special holders with a carbon-based adhesive rather than the standard sliding plate, and the extra headroom opens up semiconductor characterization across a wider temperature sweep and curing of components and glues on a temperature ramp.
Gallery
A device mounted and clamped on the heating stub, ready for temperature-dependent testing. 
The stub-mounted stage, cable exiting for the feedthrough connection. 
Mounted on a sample stage inside the chamber.
Technical data
MHS
- Range (in air)
- RT to 100 °C
- Range (in vacuum)
- RT to 200 °C
- Temperature resolution
- 1 °C
- Temperature accuracy
- 0.5 %
- Long-term stability (sensor)
- Better than 0.05 % at 200 °C after 1000 h
- Analog voltage output accuracy
- 0.5 % (after offset correction)
- Heating-up time (from RT)
- 100 s to 100 °C, 200 s to 200 °C (in vacuum, depending on vacuum level)
- Cooling-down time (from 200 °C)
- 200 s to 100 °C, 600 s to 45 °C (in vacuum, depending on vacuum level)
- Pressure range
- 10⁻⁷ mbar to 1200 mbar
- Diameter
- 16 mm
- Overall height
- 10 mm
- Pin length / pin diameter
- 6 mm / 3.2 mm
MHS450
- Range (in air)
- RT to 200 °C
- Range (in vacuum)
- RT to 450 °C
- Temperature resolution
- 0.1 °C
- Temperature accuracy
- Tolerance class B (DIN EN 60751)
- Heating-up time (from RT)
- 100 s to 100 °C, 200 s to 400 °C (in vacuum, depending on vacuum level)
- Diameter
- 15 mm
- Overall height
- 14 mm
- Pin length / pin diameter
- 6 mm / 3.2 mm
Talk to an application engineer
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