Calibration of an SEM, using a nano positioning tilting table and a microscopic calibration pyramid
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Photogrammetrists calibrated an SEM into a 3-D measuring instrument using a Kleindiek precision tilting stage to view a calibration pyramid from many angles.
Because an SEM cannot move around its specimen, three-dimensional measurement requires tilting the object instead. The authors calibrate an SEM for close-range photogrammetry using a high-precision Kleindiek tilting sample stage and a purpose-made microscopic calibration pyramid, tackling the distortions that appear at very high magnification and evaluating the orientation accuracy that can be reached.