MM3A-LMP

The bench version of a proven mechanism#

The MM3A-LMP carries the same spherical Nanomotor® mechanism as the MM3A-EM onto the open bench — an economical, flexible alternative to conventional semiconductor probing instruments, and the basis for building your own probe station. Electrical measurements demand low drift, high precision, a large working range and insensitivity to the environment; this manipulator holds all four, with resolution below 0.5 nm on axis A, 0.25 nm on B and 0.05 nm on C, and drift held to 1 nm/min.

Give your microscope a hand: use the MM3A-LMP to add new capabilities and functionality to your instrument.

Built for 45 nm and up#

It is sized for characterization on 45 nm, 65 nm, 90 nm and larger technology nodes, with a probing current range from 10 nA to 100 mA and signal resistance of 7.0 Ω. The manipulator mounts magnetically, so a bench setup goes together and comes apart fast — note that it is not vacuum compatible, so this is a light-microscopy and open-air instrument, not a chamber tool.

Add the MCS for particle removal#

For surfaces that need a final cleanup before probing, the MCS micro-valve plug-in retrofits onto the same MM3A-LMP body and clears unwanted particles with controlled pulses of compressed air — non-destructive, and adjustable in strength and length per pulse.