Micromanipulators · MM3A-EM

MM3A-EM

The industry-standard spherical micromanipulator — the platform every Kleindiek plug-in tool attaches to, with 3000+ units in the field.

Compatible
An array of MM3A-EM manipulators with magenta drive coils converging towards a central point.
3000+Units in the field
0.05 nmResolution, axis C
100 cm³Working volume
240°Range, axes A and B

Two decades, one industry standard#

Refined for electron microscopy over more than twenty years, the MM3A-EM is the OEM and retrofit standard across SEM, FIB and combined instruments — with well over 3000 units in the field. Each unit passes a one-year endurance test before it ships, and in production use drift stays below 1 nm/min, so a probe placed at the start of a long acquisition is still where you left it at the end.

Give your microscope a hand: use the MM3A-EM to add new capabilities and functionality to your instrument.

No blind axis, no stage swap#

The spherical Nanomotor® mechanism folds coarse positioning and sub-nanometre fine motion into a single drive — 0.5 nm on axis A, 0.2 nm on B, 0.05 nm on C — with no backlash and no “blind axis” the way cartesian stages have. That geometry delivers 100 cm³ of working volume from a body that mounts on one M4 tapped hole, and its compact construction keeps resonance frequencies high, so the tip stays put under the beam.

A hub for the whole toolkit#

Swap probe tips by hand between samples, then attach any of seven Kleindiek plug-in tools — microgripper, rotational wrist, force-measurement system and more. Ready-made interfacing covers Zeiss, FEI, Hitachi and Jeol instruments, door to load-lock mounts. At the National University of Singapore, two MM3A-EMs isolated a single carbon nanotube from a bundle and bent it through several micronewtons of force without breaking it.

Specifications

Technical data

Motion

Range — A & B
240°
Range — C
12 mm
Speed — A & B
up to 10 mm/s
Speed — C
up to 2 mm/s
Holding torque
3 – 4 Nmm
Holding force
1 N
Lift — B
5 g

Resolution

Axis A
0.5 nm (7 nrad)
Axis B
0.2 nm (7 nrad)
Axis C
0.05 nm

Dimensions

Length
62.1 mm
Width
20.4 mm
Height
25.4 mm
Weight
45 g
Mounting
M4 tapped hole
Material
Stainless steel, aluminium

Electrical & environment

Probing current
10 nA – 100 mA
Max. probing voltage
100 V
Signal resistance
7.0 Ω
Temperature — standard
273 K – 353 K
Temperature — UHV version
273 K – 393 K
Lowest pressure
10⁻⁷ mbar
Lowest pressure — UHV version
2 × 10⁻¹⁰ mbar
On film

See it run

MM3A-EM — micromanipulator for SEM/FIB
Manipulating nanowires with two MM3A-EM micromanipulators
Pick and place microspheres
Nanowire micromanipulation in 3D
Why it wins

Advantages

Proven & standard

  • Well over 3000 units installed worldwide — the OEM and retrofit standard for SEM and FIB
  • One-year endurance tested per unit before shipment
  • Drift held below 1 nm/min in production use

Spherical geometry, not cartesian

  • Coarse positioning and sub-nanometre fine motion share a single drive, with no dead "blind axis"
  • 100 cm³ working volume from a body that mounts on one M4 tapped hole
  • Compact construction raises resonance frequencies, keeping the tip stable under the beam

A platform for the whole toolkit

  • Swap probe tips by hand between samples
  • Accepts any of seven Kleindiek plug-in tools, from microgripper to force-measurement system
  • Ready-made interfacing for Zeiss, FEI, Hitachi and Jeol instruments, including load-lock mounts
Evidence

Related publications

All publications
2022ACS Nano 16

Aligned Stacking of Nanopatterned 2D Materials for High-Resolution 3D Device Fabrication

Jonas Haas et al.

DOI 10.1021/acsnano.1c09122
2020Nature Communications 11

Mechanical cleaning of graphene using in situ electron microscopy

Peter Schweizer et al.

DOI 10.1038/s41467-020-15255-3
2009Physical Review B 80

Magnetic energies of single submicron permalloy rectangles determined via magnetotransport

André Kobs et al.

DOI 10.1103/PhysRevB.80.134415
2009Nano Letters 9

Bottom-up Nanoconstruction by the Welding of Individual Metallic Nanoobjects Using Nanoscale Solder

Yong Peng et al.

DOI 10.1021/nl8025339
2009Spectrochimica Acta Part B: Atomic Spectroscopy

Age determination of single plutonium particles after chemical separation

T. Shinonaga et al.

DOI 10.1016/j.sab.2008.10.044
2008Nanotechnology 19

Exploring the conduction in atomic-sized metallic constrictions created by controlled ion etching

A. Fernández-Pacheco et al.

DOI 10.1088/0957-4484/19/41/415302
2008The Journal of Physical Chemistry C 112

Amplitude Response of Multiwalled Carbon Nanotube Probe with Controlled Length during Tapping Mode Atomic Force Microscopy

A. N. Jiang et al.

DOI 10.1021/jp804481g
2008Applied Physics Letters 93

Accurate electrical testing of individual gold nanowires by in situ scanning electron microscope nanomanipulators

Yong Peng et al.

DOI 10.1063/1.3005423
2008Review of Scientific Instruments 79

Integrated setup for the fabrication and measurement of magnetoresistive nanoconstrictions in ultrahigh vacuum

Daniel Stickler et al.

DOI 10.1063/1.2981693
2008Advanced Functional Materials 18

The Very Low Shear Modulus of Multi-Walled Carbon Nanotubes Determined Simultaneously with the Axial Young’s Modulus via in situ Experiments

Xian-Long Wei et al.

DOI 10.1002/adfm.200701105
2008Physical Review Letters 100

Self-Retracting Motion of Graphite Microflakes

Quanshui Zheng et al.

DOI 10.1103/PhysRevLett.100.067205
2007Microelectronics Reliability 47

3D failure analysis in depth profiles of sequentially made FIB cuts

C. N. McAuley et al.

DOI 10.1016/j.microrel.2007.07.032
2007Nanotechnology 18

Forging of metallic nano-objects for the fabrication of submicron-size components

J. Rösler et al.

DOI 10.1088/0957-4484/18/12/125303
2007Nature Materials 6

A microdiffraction set-up for nanoporous metal–organic-framework-type solids

Christophe Volkringer et al.

DOI 10.1038/nmat1991
2007Nanotechnology 18

Cutting and sharpening carbon nanotubes using a carbon nanotube ‘nanoknife’

XianLong Wei et al.

DOI 10.1088/0957-4484/18/18/185503
2006Nanotechnology 17

Establishing Ohmic contacts for in situ current–voltage characteristic measurements on a carbon nanotube inside the scanning electron microscope

Qing Chen et al.

DOI 10.1088/0957-4484/17/4/041
2006

Design of a microgripping system with visual and force feedback for MEMS applications

I. Giouroudi et al.

2006ENMA 2006

Evaluation of different control algorithms for a micromanipulation system

Harald Hötzendorfer et al.

2005Review of Scientific Instruments 76

Development and performance of the nanoworkbench: A four tip STM for conductivity measurements down to submicrometer scales

Olivier Guise et al.

DOI 10.1063/1.1878213
2004Applied Physics Letters 84

Controlled cleavage of single semiconducting nanowires and study on the suitability of their use as nanocavities for nanolasers

Qing Chen & Lian-Mao Peng

DOI 10.1063/1.1757635
2004Atmospheric Environment

Transfer of a single particle for combined ESEM and TEM analyses

R. Kaegi & L. Holzer

DOI 10.1016/S1352-2310(03)00574-0
2004Micron 35

Performing probe experiments in the SEM

L.-M. Peng et al.

DOI 10.1016/j.micron.2003.12.005
2004Applied Physics Letters 84

High-resolution nanowire atomic force microscope probe grown by a field-emission induced process

A. B. H. Tay & J. T. L. Thong

DOI 10.1063/1.1765202
2004Review of Scientific Instruments 75

Fabrication of super-sharp nanowire atomic force microscope probes using a field emission induced growth technique

A. B. H. Tay & J. T. L. Thong

DOI 10.1063/1.1791321
2002European FIB Users Group Meeting (EFUG)

In-situ Lift-Out of TEM-Lamellae using a Compact and Precise Micromanipulator

Claus Burkhardt et al.

In action

Application articles

Introduction

Introduction to APT sample preparation

Why atom probe tomography needs needle-shaped specimens, and how in-situ lift-out delivers them.

Introduction
Introduction

Introduction to TEM sample preparation

Why electron-transparent lamellae are hard to make, and how in-situ lift-out makes it routine.

Introduction
Introduction

What is nanomanipulation?

Moving, positioning and assembling individual nano-objects inside the electron microscope.

Introduction
Technical

Preparing APT needles

Lift-out, mounting and annular milling, turning bulk material into a sharp atom-probe specimen.

Technical
Technical

The in-situ lift-out workflow

Approach, attach, cut free, transfer and mount, the choreography of a clean FIB lift-out.

Technical
Technical

Two-arm handling & assembly

Using two or more manipulators together to hold, hand off and assemble nanoscale parts.

Technical
Split SEM/EBIC view of two probe tips converging on interconnect lines on 3 nm-class technology, with a 0.900 µm scale bar.
Technical

EBIC — Electron-Beam-Induced Current

Mapping where a device collects beam-generated carriers, to image p–n junctions, depletion regions and recombination sites.

Technical
Four-panel current map of a probe tip contacting a metal grid at 100 V to 300 V bias, the current spread widening with voltage.
Technical

EBAC — Electron-Beam Absorbed Current

Tracing conductive paths and finding opens in interconnects, with no bias applied to the device.

Technical
Current map localizing a small signal between two probe tips on a dense interconnect array, 0.400 µm scale bar.
Technical

RCI — Resistive Contrast Imaging

Two-contact current-division imaging that reveals the resistance distribution along a net.

Technical
Technical

EBIRCH — Electron-Beam-Induced Resistance Change

Biased, AC current imaging that lights up resistive and leaky defects as bright spots.

Technical
EBIV false-colour voltage map around a ring-shaped structure with a 3 Ω region marked.
Technical

EBIV — Electron-Beam-Induced Voltage

Reading the beam-induced voltage to reach high-impedance and floating nodes that current maps miss.

Technical
Video series

Lift-out, filmed inside the chamber

Full TEM lamella lift-outs and the iLO control software, recorded under the beam.

5 videos
Video series

Nanomanipulation in the microscope

Pick-and-place and nanowire handling, filmed inside the SEM.

3 videos
Explore

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