2004Micron 35 495–502

Performing probe experiments in the SEM

L.-M. Peng, Q. Chen, X. L. Liang, S. Gao, J. Y. Wang, S. Kleindiek, S. W. Tai

Highlight

Peking University and Kleindiek put four MM3A nanoprobes inside one SEM to grip, cut and wire up individual nanotubes — the template for in-SEM nanoprobing.

This foundational paper installs four MM3A nanoprobe systems inside an FEI XL30 F SEM, fully compatible with the microscope’s normal operation and a Gatan cold stage. The authors show the array gripping and moving nano-objects such as carbon nanotubes, setting up electrical contacts for I–V measurements, tailoring nanostructures by cutting, and even building unexpected shapes like a nanohook. It established the multi-probe in-SEM workflow that later nanoprobing systems build on.

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