In-situ Lift-Out of TEM-Lamellae using a Compact and Precise Micromanipulator
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In this early demonstration co-authored by Kleindiek, a compact Nanomotor micromanipulator built into an SEM/FIB lifts out TEM lamellae in situ, a technique now standard for site-specific TEM.
This 2002 presentation integrates a compact, vacuum-compatible Kleindiek micromanipulator into a LEO Gemini 1550 VP to perform in-situ lift-out of TEM lamellae — then a newly introduced alternative to ex-situ lift-out. The three-axis Nanomotor arm (two rotational and one linear axis, no mechanical feedthrough, electrically isolated tip) reaches the lamella under SEM/FIB observation via piezo motors after manual coarse positioning.
