2005Review of Scientific Instruments 76

Development and performance of the nanoworkbench: A four tip STM for conductivity measurements down to submicrometer scales

Olivier Guise, Hubertus Marbach, John T. Yates Jr., Moon-Chul Jung, Jeremy Levy, Joachim Ahner

Highlight

A four-tip STM ‘nanoworkbench’ at Pittsburgh used Kleindiek MM3A positioners to place four independent probes for micrometre-scale four-point conductivity measurements.

The authors present the nanoworkbench, a multi-chamber UHV system that pairs a four-tip scanning tunnelling microscope with an SEM and molecular-beam-epitaxy growth. Four MM3A manipulators position the probes independently, enabling local four-point-probe conductivity measurements at micrometre spacing — demonstrated by STM imaging of graphite and four-point measurements on silicon-on-insulator, including a locally defined field-effect transistor.

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