2006

Design of a microgripping system with visual and force feedback for MEMS applications

I. Giouroudi, H. Hötzendorfer, D. Andrijasevic, M. Ferros, W. Brenner

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A microgripping system for MEMS assembly combined a Kleindiek MM3A with both visual and force feedback — adding a sense of touch to automated microhandling.

The authors design a microgripping system for handling and assembling MEMS parts, built around the Kleindiek MM3A (two rotational and one linear axis, 240° range, sub-nanometre resolution) carrying a microgripper, with a light microscope and CCD camera for visual servoing. Adding force feedback alongside vision gives the system a sense of grip, improving reliable pick-and-place in microtechnology.

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An array of MM3A-EM manipulators with magenta drive coils converging towards a central point.
MM3A-EM

MM3A-EM

The industry-standard spherical micromanipulator — the platform every Kleindiek plug-in tool attaches to, with 3000+ units in the field.

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