2004Applied Physics Letters 84

High-resolution nanowire atomic force microscope probe grown by a field-emission induced process

A. B. H. Tay, J. T. L. Thong

Highlight

By a field-emission process, NUS grew vertical tungsten-nanowire AFM tips on demand, two MM3A manipulators positioning the tip and clamping even soft cantilevers inside an ESEM.

A field-emission-induced growth process grows vertically aligned tungsten-nanowire AFM probes whose length is set by the growth time. Two three-axis MM3A micromanipulators in a Philips XL-300 ESEM position the etched tungsten tips and clamp low-stiffness cantilevers, so the technique works even on soft probes. The resulting high-aspect-ratio tips give high-resolution tapping-mode imaging and better profiling of steep sidewalls.

Get in touch

Talk to an application engineer

Tell us your sample and your microscope — we’ll walk you through the workflow and route you to the right regional team.