ProbeWorkstation+
Up to eight manipulators, a roof-mounted prober and a 30 mm substage — a complete in-SEM probe station, installed or removed in 60 seconds.
A prober in the roof#
Two things defeat conventional in-SEM probing on today’s samples: sites that manual setups cannot reach without adjustment, and metal lines that run past the beam-shift range. The ProbeWorkstation+ answers with two kinds of manipulator. Platform-mounted probers travel with the sample; a roof-mounted prober is always insertable at the centre of the field of view, parking and restoring itself automatically.
Step and repeat across 30 mm#
A long-range substage adds 30 mm of travel in X and Y (optionally 3 mm in Z), extending the manipulators’ reach and enabling step-and-repeat measurements across a 70 × 70 mm sample. The actively drift-stabilized platform fits up to eight manipulators for SRAM probing and supports in-situ sample heating, cooling and LED illumination.
Sixty seconds to install#
The whole platform is installed or removed in 60 seconds and stands just 31 mm tall, leaving an unobscured view of the entire sample. Every prober and the substage run from the Advanced Probing Tools GUI, and the signal chain keeps low-current work clean: 25 fA noise at 1 Hz, leakage below 50 fA/V at the probes, ready for measurements at 5 nm and beyond.
Gallery
Eight probes share one sample — the 30 mm substage brings any site under the tips. 
In the chamber, the 31 mm-tall platform leaves an unobscured view of the entire sample. 
The complete platform installs — and removes — in 60 seconds.
Technical data
Platform
- Platform dimensions
- 180 × 180 mm
- Height
- 31 mm
- Typical sample size
- 70 × 70 mm (max 10 mm height)
- Weight
- ~1200 g
- Drift stabilization
- Active
- Installation
- Installed & removed in 60 s
Probers
- Range — A & B
- 240°
- Range — C
- 12 mm
- Resolution (all axes)
- < 0.5 nm
- Speed (all axes)
- up to 1 mm/s
- Drift
- < 1 nm/min
- Motion at probing location
- Cartesian
Measurement sensitivity
- Noise
- 25 fA @ 1 Hz
- Insulation leakage (probes)
- < 50 fA/V
- Insulation leakage (sample)
- < 150 fA/V
- Signal conductor resistance
- < 5 Ω
- Max. voltage
- 100 V
- Max. current
- 100 mA
Substage
- Travel — X & Y
- 30 mm
- Optional Z travel
- 3 mm
- Repeatability
- 50 nm (optional encoders)
- Angular deviation
- < 1 µrad
- Load
- 500 g
- Z lift capacity
- 25 g
- Sample mounting
- Clip or 2 × M3 holes
Advantages
Any site on the sample
- Roof-mounted prober inserts at the centre of the field of view, with automatic park and restore
- Platform-mounted manipulators travel with the sample
- 30 mm XY substage enables step-and-repeat measurements
- Follows metal lines that extend past the SEM's beam-shift range
Eight probes, unobscured view
- Fits up to eight manipulators for SRAM probing
- Unobscured view of the entire sample
- Supports in-situ sample heating, cooling and LED illumination
- Fully integrated control via the APT GUI
Stability for advanced nodes
- Active drift stabilization on the platform
- Drift below 1 nm/min, resolution below 0.5 nm on all axes
- Stable enough for low-kV probing at 5 nm and beyond
- Installed and removed in 60 seconds
Built for clean measurement
- 25 fA noise at 1 Hz
- Leakage below 50 fA/V at the probes and 150 fA/V at the sample
- Signal conductor resistance under 5 Ω
- Up to 100 V and 100 mA
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