6-Axis Alignment Stage
Two stacked three-axis stages for aligning two objects to each other — and the assembly to an external beam.
Two stages, six axes#
The 6-Axis Alignment Stage stacks two three-axis stages on top of one another inside a 68 × 68 × 65 mm frame. The lower stage carries 20 mm of X/Y travel and 15 mm of Z; the upper stage adds a finer 10 mm of X/Y and 7 mm of Z, with every linear axis resolving better than 0.05 nm and drift held under 1.5 nm/min at speeds up to 1 mm/s.
Align twice, not once#
Six axes between the two stages let you solve two alignment problems in sequence: bring two objects into register with each other on the upper stage, then move the whole assembly into register with an external reference — a particle beam, for example — using the lower stage. Encoders on the lower X1/Y1 axes hold 100 nm repeatability, varying with the working distance from the encoder.
Tell us about the two objects you need to align — talk to an application engineer about your setup.
Technical data
Dimensions
- Length
- 68 mm
- Width
- 68 mm
- Height
- 65 mm
Travel
- Lower stage X1 and Y1
- 20 mm
- Lower stage Z1
- 15 mm
- Upper stage X2 and Y2
- 10 mm
- Upper stage Z2
- 7 mm
Resolution & accuracy
- Resolution, linear axes
- < 0.05 nm
- Encoder repeatability (X1/Y1)
- 100 nm (varies with working distance from the encoder)
Performance
- Speed
- up to 1 mm/s
- Drift
- < 1.5 nm/min
See it run
Advantages
Precise and stable
- Cartesian movement on all six axes
- Resolution better than 0.05 nm on the linear axes
- Drift under 1.5 nm/min
- 100 nm encoder repeatability on the lower X1/Y1 axes
Talk to an application engineer
Tell us your sample and your microscope — we’ll walk you through the workflow and route you to the right regional team.