Substages · E5AT

E5AT

A five-axis eucentric stage — unlimited rotation and ±90° tilt while keeping the region of interest centred, for ECCI, EBSD and tomography.

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Compatible
The E5AT stage — a stainless-steel five-axis substage with twin upright bearings cradling a tilting platform that carries a patterned sample chip.
±90°Eucentric tilt
360°Unlimited rotation
< 0.02 nmLinear resolution
10 mmX and Y travel

Ten by ten, then tilted#

The E5AT (Eucentric 5-Axis Table) is a 72 × 50 × 44 mm stage built so the area of interest never leaves the eucentric point, however far it is tilted or rotated. A four-axis substage — 10 mm of travel in both X and Y, 3 mm in Z, plus unlimited rotation — sits on a tilting platform whose positional encoder resolves ±90° of tilt to 0.1°, holding absolute accuracy under 0.4° (7 mrad). Linear-axis resolution runs below 0.02 nm; the rotation axis is available with its own encoder for applications that need R held to the same 0.4° accuracy.

From ECCI to a mounted gripper#

Because the region of interest tracks the tilt and rotation axes rather than sliding off them, the E5AT suits electron channelling contrast imaging, electron backscatter diffraction and tomography — any workflow built around repositioning a sample without losing eucentricity. An integrated microgripper can be fitted as an option, turning the stage into a manipulation platform at the same eucentric point rather than a separate tool swapped in afterwards.

Specifications

Technical data

Dimensions

Length
72 mm
Width
50 mm
Height
44 mm

Travel

X and Y
10 mm
Z
3 mm
Rotation (R)
360° (unlimited), optional encoder
Tilt (T)
±90° (with encoder)

Resolution & accuracy

Absolute accuracy (T)
< 0.4° (7 mrad)
Absolute accuracy (R)
< 0.4° (7 mrad), with R-encoder
Repeatability (T)
< 0.03° (0.4 mrad)
Resolution, linear axes
< 0.02 nm
Resolution, rotational axes
< 0.4 µ° (7 nrad)

Performance

Speed
up to 1 mm/s
Drift
< 1.5 nm/min
On film

See it run

Eucentric Five Axis Tilting Stage
Going Eucentric with the E5AT
Sample Exchange with the E5AT eucentric substage
Mounting a gripper to the E5AT (custom edition)
Why it wins

Advantages

Precise and stable

  • Linear-axis resolution below 0.02 nm, tilt resolved to 0.1° by the platform encoder
  • Absolute tilt accuracy < 0.4° (7 mrad), with optional rotation encoder to match
  • Optional integrated microgripper for manipulation at the eucentric point
  • No backlash or reversal play; coarse and fine displacement in one drive
Explore

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Talk to an application engineer

Tell us your sample and your microscope — we’ll walk you through the workflow and route you to the right regional team.

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