SFLT3310
An ultra-low-profile 3.8 mm-tall piezo linear table — smooth XY motion in the tightest spaces, ideal paired with the Prober Shuttle.
3.8 millimetres, aluminium#
The SFLT3310 is the flattest table in the range: 3.8 mm tall, 33 × 33 mm in aluminium, and 10 g. That combination of thinness and light weight is what lets it slide underneath the Prober Shuttle without adding meaningful height or mass to the sample stage — a slot the stainless-steel LT tables can’t fill. A 4 mm centre hole locates samples up to 23 × 23 mm directly over the drive, and the stage still carries a 50 g load.
Flat, not compromised#
Despite the profile, the mechanics give up nothing: 10 mm of XY travel resolves below 0.02 nm at up to 1 mm/s. Beyond the SEM/FIB, where it partners the Prober Shuttle for nanoprobing, the same low profile suits TEM aperture positioning, cell counting and particle counting wherever headroom is tight.
Wider operating range#
Standard units run from atmosphere to 10⁻⁷ mbar between 273 K and 353 K. The UHV version extends that to 10⁻¹⁰ mbar and 423 K (150 °C) — a wider high-temperature reach than the other substages in the family.
Technical data
Dimensions
- Length
- 33 mm
- Width
- 33 mm
- Height
- 3.8 mm
- Weight
- 10 g
- Central hole
- 4 mm ø
Travel
- XY
- 10 mm
- Speed
- up to 1 mm/s
Resolution & accuracy
- Resolution
- < 0.02 nm
Load capacity
- Load
- 50 g
- Maximum sample size
- 23 × 23 mm
Environment
- Temperature range
- 273 K – 353 K
- Temperature range (UHV version)
- 273 K – 423 K (150 °C)
- Lowest pressure
- 10⁻⁷ mbar
- Lowest pressure (UHV version)
- 10⁻¹⁰ mbar
Mounting & build
- Substage mounting
- 4 × 2 mm holes
- Sample mounting
- 4 mm centre hole
- Material
- Aluminium
Advantages
Ultra-low profile
- Just 3.8 mm tall
- 33 × 33 mm footprint in aluminium, 10 g
- Fits the tightest spaces, paired with the Prober Shuttle
- Mounts via 4 × 2 mm holes
Faster and more precise
- 10 mm of XY travel
- Resolution better than 0.02 nm
- 4 mm centre hole locates samples up to 23 × 23 mm
- Carries a 50 g load
More robust and more stable
- Operates to 10⁻⁷ mbar, UHV version to 10⁻¹⁰ mbar
- Temperature range 273 K – 353 K, UHV version to 423 K (150 °C)
- Travel speed up to 1 mm/s
Clearer and simpler
- Compact, stand-alone electronics with PC interface
- Quick setup and removal
- Aluminium build keeps mass off the sample stage
Related products & accessories
Talk to an application engineer
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