Prober Shuttle PS4
A compact two- or four-probe nanoprobing system for in-situ electrical characterization at advanced nodes.
Fifteen axes, one hundred millimetres#
The PS4 shrinks the Prober Shuttle platform to 100 mm in diameter while keeping the same MM4 manipulator design: two or four probes plus a three-axis substage, fifteen axes of motion in total, each still resolving linear moves below 0.05 nm. Prober travel is actually more generous on the X axis here — 9 mm against 5 mm on the eight-probe shuttles — useful headroom when a device sits off-centre on a smaller sample.
Compact enough for a desktop SEM#
A 4 inch load lock moves the whole platform in and out of the chamber without breaking vacuum, keeping cycle times short even in compact instruments — including the Phenom desktop SEM, where an eight-probe shuttle simply will not fit. Every manipulator carries a low-noise triax connector, so the PS4 measures the same small currents as its larger siblings, and it shares the family’s optional Advanced Probing Tools suite, FIB-angle tilt for circuit-edit work, and non-magnetic build.
Gallery
The 100 mm platform from below, showing the drive assemblies feeding each manipulator. 
The PS4 mounted inside a compact SEM chamber, viewed through the viewport. 
Three probes closing in on a patterned surface — 200 nm scale bar.
Technical data
Overview
- Diameter
- 100 mm
- Total height
- 10 mm
- Max. sample area
- 20 × 20 mm
- Manipulators
- 2 or 4 × MM4
- Axes
- up to 15
Substage
- Travel — X / Y
- 9 mm
- Travel — Z
- 0.7 mm
Motion (per manipulator)
- Range — A (X)
- 9 mm
- Range — C (Y)
- 5 mm
- Range — B (rotation)
- 90°
- Resolution — A / C
- < 0.05 nm
- Resolution — B
- < 0.5 nm
- Max. velocity
- up to 1 mm/s
- Drift
- < 1 nm/min
Electrical
- Max. voltage
- 100 V
- Max. current
- 100 mA
- Noise
- 20 fA @ 1 Hz
- Insulation leakage — probes
- < 50 fA/V
- Insulation leakage — sample
- < 150 fA/V
- Signal conductor resistance
- < 5 Ω
Advantages
Compact by design
- 100 mm platform diameter — two-thirds the footprint of the eight-probe shuttles
- Two or four MM4 manipulators, with an optional two- or three-axis substage
- Fits compact chambers, including the Phenom desktop SEM, via a 4 inch load lock
Full-size performance
- Linear resolution below 0.05 nm, rotational below 0.5 nm, on every axis
- 9 mm of X-axis prober travel — more headroom than on the eight-probe shuttles
- Low-noise triax connector per manipulator for clean low-current measurement
- Compatible with the Advanced Probing Tools suite
Related products & accessories
Prober Shuttle PS4 @ Phenom XL
Four-probe in-situ electrical nanoprobing inside the Phenom XL desktop SEM, built on the ultra-flat MM4 manipulator platform.
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Prober Shuttle PS8e
A compact, fully integrated nanoprobing system — now encoded for automatic probe pre-alignment at the 3 nm node and beyond.
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Prober Shuttle PS8
High-precision in-situ electrical nanoprobing with up to eight ultra-flat MM4 manipulators — for advanced-node failure analysis.
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