LT14030
A 30 mm-travel encoded linear table with dual-encoder yaw compensation — an economical alternative to laser-interferometer stages.
Thirty millimetres, yaw-corrected#
At 141 × 133 mm the LT14030 is the largest table in the linear-stage range, giving 30 mm of X and Y travel under the standard SEM/FIB sample stage — half again the reach of the LT6820. Two encoders per axis track yaw independently rather than relying on a single reference point, holding reproducibility to 100 nm and measurement resolution to 50 nm across the full 30 mm span, with steps below 0.02 nm and angular deviation under 10 µrad.
An alternative to laser interferometry#
The dual-encoder scheme is built as an economical stand-in for laser-interferometer metrology, and the LT14030 is also offered with laser interferometers on X and Y for shops that need them — a configuration that additionally avoids the roughly 55 °C of self-heating the stage otherwise reaches during operation. An open-loop version without encoders, and an optional 5 mm Z axis, are both available.
Built for the production floor#
Lithography, memory-cell counting, CAD navigation, tensile measurement, metrology and forensic work such as gunshot-residue analysis all run on the table’s 500 g load capacity and up to 1 mm/s travel speed. Pair it with the 3PA software for three-point sample alignment, and the low-profile 21 mm deck mounts through three 3.2 mm holes for a fast changeover.
Technical data
Dimensions
- Length
- 141 mm
- Width
- 133 mm
- Height
- 21 mm
- Weight
- 420 g
Travel
- X and Y
- 30 mm
- Z axis (optional)
- 5 mm
- Speed
- up to 1 mm/s
Resolution & accuracy
- Smallest step size
- < 0.02 nm
- Reproducibility
- 100 nm
- Measurement resolution
- 50 nm
- Angular deviation
- < 10 µrad
Load capacity
- Load
- 500 g
Environment
- Temperature range
- 273 K – 353 K
- Lowest pressure
- 10⁻⁷ mbar
- Self-heating (in operation)
- approx. 55 °C
Mounting
- Substage mounting
- 3 × 3.2 mm holes
Advantages
Large-range encoded travel
- 30 mm of X and Y travel, optional 5 mm Z
- Two encoders per axis for automatic yaw-error compensation
- An economical alternative to laser-interferometer stages
- Also available open-loop or with laser interferometers
Faster and more precise
- Smallest step size below 0.02 nm
- Reproducibility of 100 nm, measurement resolution 50 nm
- Angular deviation below 10 µrad
- Travel speed up to 1 mm/s
More robust and more stable
- For lithography, cell counting, nanoprobing and failure analysis
- 500 g load capacity
- Operates to 10⁻⁷ mbar
- Three-point-alignment software
Clearer and simpler
- 141 × 133 mm low-profile platform, 21 mm tall
- Mounts via 3 × 3.2 mm holes
- Compact, stand-alone electronics with PC interface
- Fast setup and removal
Related products & accessories
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