LT6620
The open-loop 20 mm linear/Z table — large-range, high-precision positioning where encoders aren't required.
Twenty millimetres, no encoders#
The LT6620 puts 20 mm of X and Y travel — plus an optional 15 mm Z axis — under a standard SEM/FIB sample stage, and deliberately leaves the positional encoders out. Where a job doesn’t call for repeatability or automation, that omission is the point: you get the same travel, load capacity and step resolution as the encoded LT6820 in a 66 × 66 mm footprint, at lower cost. Cell counting and particle counting are typical duties.
Open-loop, still sub-nanometre#
Without feedback the mechanics carry the precision on their own. Steps resolve to better than 0.02 nm, unidirectional angular deviation stays below 10 µrad, and drift holds at 1 nm/min, while the drives cover the full range at up to 2 mm/s. The stage carries 500 g and lifts 200 g on the Z column.
From bench to UHV#
Built in stainless steel, the standard version works from atmosphere down to 10⁻⁷ mbar between 273 K and 353 K. A UHV version extends that to 2 × 10⁻¹⁰ mbar and 393 K, and low-temperature and non-magnetic builds are available on request.
Technical data
Dimensions
- Length
- 66 mm
- Width
- 66 mm
- Height (XY)
- 26 mm
- Height (XYZ)
- 50 mm + 15 mm travel
- Weight (XY)
- 200 g
- Weight (XYZ)
- 270 g
Travel
- XY
- 20 mm
- Z
- 15 mm
- Speed
- up to 2 mm/s
Resolution & accuracy
- Resolution
- < 0.02 nm
- Angular deviation (unidirectional)
- < 10 µrad
- Drift
- 1 nm/min
Load capacity
- Load
- 500 g
- Lift
- 200 g
Environment
- Temperature range
- 273 K – 353 K
- Temperature range (UHV version)
- 273 K – 393 K
- Lowest pressure
- 10⁻⁷ mbar
- Lowest pressure (UHV version)
- 2 × 10⁻¹⁰ mbar
Mounting & build
- Substage mounting
- 4 × 3.2 mm holes
- Sample mounting
- 4 × M3 holes
- Material
- Stainless steel
Advantages
Open-loop and economical
- Encoder-free alternative to the LT6820
- 20 mm of XY travel, optional 15 mm Z
- Economical where repeatability or automation isn't required
- 500 g load capacity, 200 g lift
Faster and more precise
- Resolution better than 0.02 nm
- Angular deviation below 10 µrad
- Drift of 1 nm/min
- Travel speed up to 2 mm/s
More robust and more stable
- Standard operation to 10⁻⁷ mbar
- UHV version reaches 2 × 10⁻¹⁰ mbar and 393 K
- Stainless-steel construction
- For atmosphere, SEM/FIB, UHV and low temperature
More compact and more flexible
- 66 × 66 mm footprint
- Orthogonal X/Y/Z positioning
- Compact, stand-alone electronics with PC interface
- Fast setup and removal
Related products & accessories
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