NanoprobingVideo series

Nanoprobing in the microscope

In-situ nanoprobing and failure analysis, filmed inside the SEM, from probe landing to live I–V curves.

Failure analysis using in-SEM nanoprobing (FAMT 2021)

These recordings step through in-situ nanoprobing and failure analysis inside the microscope: landing probes on advanced-node devices, recording live I–V curves, and loading the Prober Shuttle.

Tools

Products used

Top-down view of the PS8e Prober Shuttle, eight MM4 manipulators converging on a central chip.

Prober Shuttle PS8e

A compact, fully integrated nanoprobing system — now encoded for automatic probe pre-alignment at the 3 nm node and beyond.

SEM image of eight nanoprobe tips converging on a patterned chip surface, 200 nm scale bar.

Prober Shuttle PS8

High-precision in-situ electrical nanoprobing with up to eight ultra-flat MM4 manipulators — for advanced-node failure analysis.

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